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9812DX

1/f Noise Measurement System

Introduction

The 9812DX is an enhanced version of the industry's de-facto standard flicker noise measurement systems 9812D and 9812B that sets new records in measurement speed, system resolution and coverage of different types of measurement requirements for flicker noise and random telegraph noise (RTN or RTS). Flicker or 1/f (low frequency) is the dominant noise for deep sub-micron CMOS, bipolar junction transistor (BJT), field effect transistor (FET) and heterojunction bipolar transistor (HBT) devices.

The 9812DX includes a more than 10X increase in measurement resolution than previous systems, higher voltage tolerance up to 200V, and lower current support down to 0.1nA. Thus, the instrument provides extended capability to cover such extreme conditions as diode dark current noise.

The 9812DX is widely used for development of the most advanced semiconductor process technology nodes, from 14 nm and 10nm to 7nm and 5nm. It is the only instrument on the market that accommodates a complete range of measurement conditions for both high and low impedance devices, with a range of 10-10MΩ. The system

With a typical noise measurement speed of 10 sec/bias, 9812DX sets a high-speed record, enabling fast and accurate noise characterization to meet the needs of process quality monitoring, statistical noise analysis and advanced circuit designs.

Key Benefits

Proven gold standard – adopted by all leading foundries & top semiconductor IC companies

Uppermost resolution – multiple built-in Low noise amplifiers (LNAs) provide widest impedance matching range

Full device type accommodation – all conditions including high voltage and extreme low current

Highest speed – fastest noise measurement and statistical noise analysis

Technological totality – proven at all technology nodes including 14/7/5nm

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Applications

Process quality monitoring for technology development

Noise characterization for SPICE model extraction

Process/device evaluation for advanced circuit designs

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Hardware Specifications

NoiseProPlus Specifications:

Drivers for 9812DX/D/B/A, and all popular IV meters

Drivers for Cascade/SUSS/MPI probe stations

Multi-mode/device/bias auto measurement control

Simultaneous 1/f and RTN noise characterization

Statistical noise characterization and analysis features

Rich graphic and data analysis features

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