Introduction

Primarius 9812DX is an enhanced version of the industry's de-facto standard flicker noise (1/f noise) measurement systems 9812D and 9812B. 9812DX sets new records in measurement speed, system resolution and coverage of different types of measurement requirements for flicker noise and random telegraph noise or signaling (RTN or RTS). Flicker noise is the dominant noise for deep sub-micron and nanometer CMOS, bipolar junction transistor (BJT), field effect transistor (FET) and heterojunction bipolar transistor (HBT) devices.

9812DX includes an order of magnitude improvement in measurement resolution compared with the legacy systems, and higher voltage tolerance of up to 200V. The 9812DX system provides extended capability to cover extreme conditions such as diode dark current noise and is the only system in the market that accommodates a complete range of measurement conditions for both high and low impedance devices, ranging from 10Ω to 10MΩ.

To meet the challenge of explosive growth requirements for low frequency noise test in advanced technology nodes, especially FinFET technology, 9812DX delivers a significant and innovative improvement in hardware and software design. With a typical noise measurement speed of 20 sec/ bias, 9812DX sets a new high-speed record. The 9812DX can be used in conjunction with the Primarius semiconductor parameter testing system FS-Pro, providing a parallel testing framework solution that significantly improves testing efficiency and throughput. 

The 9812DX has been adopted by many foundries following 9812B/D and has become the new golden tool for low frequency noise testing. It is widely used for development of the most advanced semiconductor process technology nodes, from 14nm and 10nm to 7nm and 5nm.

Key Advantage

Proven gold standard:Indispensable tool for many leading foundries & top fabless companies

Ultimate resolution:Multiple built-in LNAs provide the widest impedance matching range

Full device type coverage:All conditions including high voltage and extreme low current

Highest speed:Fast noise measurement speed and efficient statistical noise analysis

Broad technology support:Proven in all technology nodes including 14/10/7/5nm

Hardware Specifications

• Wide range

-- Maximum terminal voltages and currents: 200V, 200mA

• High resolution

-- System noise current resolution: <10^-27A²/Hz

• High speed

-- 20 sec/bias for typical device 1/f noise 

• Wide impedance range

-- DUT impedance ranging from 10Ω to 10 MΩ 

• Input/Load resistors

-- 16 Gate/Base options, 15 Drain/Collection options
-- Voltage LNA: 0.03-10MHz, 0.65nV/Hz (@5kHz)
-- Current LNA: 0.03-1MHz, 0.7pA/Hz (@5kHz)
-- Wideband current LNA: 0.03-10MHz, 5pA/ √ Hz (@5KHz)

-- High precision current LNA: 0.03-20KHz, 60fA/ √ Hz (@5KHz）

-- Built-in ADC and DSA, ESD DUT Protections

Software Specifications

The 9812DX features NoiseProPlus as the built-in software. NoiseProPlus has very powerful functionality for 1/f noise and RTN noise measurement and data analysis.

Specifications :

• Drivers for 9812DX/D/B/A, and all popular IV meters
• Drivers for Cascade/SUSS/MPI probe stations
• Multi-mode device and bias auto-measurement control
• Simultaneous 1/f and RTN noise characterization
• Statistical noise characterization and analysis features
• Rich graphical and data analysis features

Applications

Process quality evaluation and monitoring for advanced technology (FinFET/FD-SOI/GaN) development
Noise characterization for SPICE model extraction
Process/device evaluation for advanced circuit designs

 Application Example

 

Please refer to 9812/FS-Pro Technical White Paper for more technical instructions on noise testing/semiconductor parametric testing. Primarius - White Paper (primarius-tech.com)