Introduction

FS-Pro is an All-In-One Semiconductor Parameter Analyzer, effectively integrating high precision IV, CV, pulse IV, transient IV sampling, arbitrary linear waveform generation and measurement, high-speed time-domain signal acquisition and low-frequency noise test capability in a compact machine. Almost all the low frequency device characteristics can be measured in FS-Pro. Powerful testing and analysis functionality greatly accelerates device research and process evaluation. FS-Pro can be used in conjunction with the Primarius low frequency noise measurement system 9812 that significantly improves noise testing efficiency and throughput. It also supports parallel measurement, which improves the measurement efficiency significantly.

FS-Pro adopts PXI modular architecture to maintain compact size and ensure future extensibility, support multi[1]channel parallel testing to further improve the testing efficiency. System built-in professional testing software LabExpress provides users with rich test presets and powerful functions to realize a user friendly plug and play experience.

FS-Pro has a wide range of applications for semiconductor devices, LED materials, two-dimensional materials, nanomaterials, and novel devices.

FS-Pro has received widespread customer adoption and industry-wide recognition due to its comprehensive testing functionality. The system has been adopted not only by leading design companies, foundries and IDMs, but also many world-class universities and academic research institutions.

Key Advantage

All-In-One

High precision IV, CV, pulse IV and transient IV sampling and 1/f noise test all parameters in one box

Provide complete low-frequency parametric characterization without switching cables or probe connections

Wide Range and High Precision

High speed sampling time domain signal acquisition

Modular Architect

Modular architect enables flexible test configurations, compact size and future extensibility.

Easy to Use

Build-in software LabExpressTM offers intuitive GUI and supports powerful measurement and analysis function, it can generate any voltage synchronous and follow waveform without complicated programming.

As 9812DX's internal SMU module

Seamlessly integrated with 9812D/DX system and NoiseProPlus software, providing significant testing speed improvement.

Applications

Opto-electronic device and MEMS measurement

Advanced materials and Device measurement

Non-destructive measurement and inspection

Ultra-low frequency noise measurement

Device reliability test

Device ultrashort pulse test

Software Specifications

LabEXpress offers an intuitive GUI and supports powerful measurement and analysis functions
Complete DC IV, pulse IV, transient IV sampling, CV, and 1/f noise measurement functions
Built-in device types: MOSFET，BJT，diode，resistor， capacitor; features a multitude of measurement presets for the user to perform testing efficiently and easily
Data analysis features such as curve conversion and plotting enable device characterization analysis to be done in a short amount of time
Supports multiple data output formats for further analysis: data can be loaded into modeling software such as BSIMProPlus and MeQLab for model extraction
Professional version of LabExpress supports to control a semi-auto probe station, switching matrix for wafer mapping and testing automation. The parallel testing functionality improves testing efficiency significantly

Hardware Specifications

DC IV

-- ±200V/1A bias range, 4 quadrants operation

-- Minimum 30fA current accuracy and 30uV voltage accuracy

-- Maximum 20W output power

CV

-- Build-in CV: ±200V DC bias range, maximum 10kHz Bandwidth 20fF~1mF measurement range

-- External LCR: ±40V DC bias range，40Hz~5MHz bandwidth 100fF~10mF measurement range

Pulse IV

-- ±200V/3A bias range，maximum 480W output power

-- Minimum 5pA current measurement accuracy

-- 30uV voltage measurement accuracy，minimum pulse width 50us

Transient IV

-- Arbitrary waveform output

-- Maximum sample rate 1.8MS/s，minimum 10us time step

1/f Noise

-- Standard 100kHz bandwidth，supports RTN

-- Minimum frequency resolution 1mHz, measures down to 2e-28A2⁄ /Hz and <10s/bias

-- DUT minimum impedance: 500Ω

Application Example

Please refer to 9812/FS-Pro Technical White Paper for more technical instructions on noise testing/semiconductor parametric testing. Primarius - White Paper (primarius-tech.com)

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Engineering Service

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